Airgard is a leading supplier of efficient and reliable Epi scrubbers for major semiconductor companies worldwide, offering Point Of Use (POU) abatement gas scrubber solutions for deposition, etch, and diffusion process tools. Their scrubbers combine innovative inlet device technology, a PLC-based control box, and automated gas inlet plunger to ensure low-maintenance operation, increased uptime, process stability, and enhanced safety.
With over 1000 units in the field, Airgard's scrubbers and inlet devices are highly regarded in the industry, providing superior gas abatement technology for Epitaxial, Metal Etch, Poly Etch, and CVD process applications. Their patented non-clogging gas inlet device, high-flow spray chambers, and unique packed column design enable the removal of 99.99% of water-soluble gases, resulting in emissions well below 1 ppm under the harshest Epi process conditions.
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