Automated Visual Inspection, located in Los Altos, CA, is a leading provider of optical metrology systems for the semiconductor industry. Their Flux-Area measurement technique offers high accuracy and repeatability in defect sizing, allowing for effective defect disposition and specification on photomasks.
With their state-of-the-art technology, Automated Visual Inspection enables lithographers to make informed decisions regarding mask defect and contact specifications, even as chip geometries continue to shrink. Their innovative approach has breathed new life into the traditional defect specification technique, providing long-term repeatability and reducing the need for large guard bands.
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