Airgard Inc. is a leading supplier of Point Of Use (POU) abatement gas scrubber solutions for deposition, etch, and diffusion process tools, catering to major semiconductor companies worldwide. Their efficient and reliable Epi scrubbers combine superior technology, including patented non-clogging gas inlet devices, high-flow spray chambers, and a unique packed column design, resulting in high efficiencies and low emissions.
With over 1000 units in the field, Airgard's scrubbers and inlet devices are highly regarded in the industry, servicing Epitaxial, Metal Etch, Poly Etch, and CVD process abatement applications. Their expertise in Epi reactor operation, design, and maintenance has led to the development of unrivaled gas abatement technology, ensuring higher uptime, process stability, and safety.
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